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Characterization of Ta/TaN multi-graded thin film coating synthesized by HiPIMS technique

Abstract

This research aims to synthesize and characterize the multi-graded Ta/TaN thin film coatings on AISI 52100 steel, employing the High Power Impulse Magnetron Sputtering technique. The investigation includes the microstructure, coating thickness, elemental composition, microhardness, and tribological performance using SEM, EDS, XRD, microhardness tester, and pin-on-disc tester, respectively.