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Surface measurement data of polished LTCC

Citation

Lubov, Maxim; Kharlamov, Vladimir; Bartsch, Heike (2022), Surface measurement data of polished LTCC, Dryad, Dataset, https://doi.org/10.5061/dryad.kwh70rz5w

Abstract

The archive contains the raw data and processed data for the calculation of inclination angle, 1-dimensional profiles for PSD analysis, masked data for pore analysis (distribution, shape factor, pore size, porosity) and RMS height calculation. Data structure and links to the calculation scripts are provided in the README document.

Methods

The data set contains raw data of the polished surface of LTCC substrates and compares good and bad polishing conditions. The data set is obtained by laser scanning microscopy. 

Usage Notes

You will find the assignment of the measurements in the README file. Related scripts are provided on GitHub and linked in this document too.

Funding

Carl-Zeiss-Stiftung, Award: MemWerk (P2018-01-002)

Deutscher Akademischer Austauschdienst, Award: 57435564