Surface measurement data of polished LTCC
Lubov, Maxim; Kharlamov, Vladimir; Bartsch, Heike (2022), Surface measurement data of polished LTCC, Dryad, Dataset, https://doi.org/10.5061/dryad.kwh70rz5w
The archive contains the raw data and processed data for the calculation of inclination angle, 1-dimensional profiles for PSD analysis, masked data for pore analysis (distribution, shape factor, pore size, porosity) and RMS height calculation. Data structure and links to the calculation scripts are provided in the README document.
The data set contains raw data of the polished surface of LTCC substrates and compares good and bad polishing conditions. The data set is obtained by laser scanning microscopy.
You will find the assignment of the measurements in the README file. Related scripts are provided on GitHub and linked in this document too.
Carl-Zeiss-Stiftung, Award: MemWerk (P2018-01-002)
Deutscher Akademischer Austauschdienst, Award: 57435564