Supplementary information for: Deterministic assembly of arrays of lithographically defined WS_2 and MoS_2 monolayer features directly from multilayer sources into van der Waals heterostructures

Taylor, Hayden, University of California, Berkeley, https://orcid.org/0000-0001-9810-6505

Nguyen, Vu, University of California, Berkeley

Gramling, Hannah, University of California, Berkeley

Towle, Clarissa, University of California, Berkeley

Li, Wan, University of California, Berkeley

Lien, Der-Hsien, University of California, Berkeley

Kim, Hyungjin, University of California, Berkeley

Chrzan, Daryl, University of California, Berkeley

Javey, Ali, University of California, Berkeley

Xu, Ke, University of California, Berkeley

Ager, Joel, University of California, Berkeley

hkt@berkeley.edu

Publication date: October 24, 2019

Publisher: Dryad

https://doi.org/10.6078/D16T1S

Citation

Taylor, Hayden et al. (2019), Supplementary information for: Deterministic assembly of arrays of lithographically defined WS_2 and MoS_2 monolayer features directly from multilayer sources into van der Waals heterostructures, Dryad, Dataset, https://doi.org/10.6078/D16T1S

Abstract

One of the major challenges in the van der Waals (vdW) integration of 2D materials is achieving high-yield and high-throughput assembly of pre-defined sequences of monolayers into heterostructure arrays. Mechanical exfoliation has recently been studied as a promising technique to transfer monolayers from a multilayer source synthesized by other techniques, allowing the deposition of a wide variety of 2D materials without exposing the target substrate to harsh synthesis conditions. Although a variety of processes have been developed to exfoliate the 2D materials mechanically from the source and place them deterministically onto a target substrate, they can typically transfer only either a wafer-scale blanket or one small flake at a time with uncontrolled size and shape. Here we present a method to assemble arrays of lithographically defined monolayer WS₂ and MoS₂ features from multilayer sources and directly transfer them in a deterministic manner onto target substrates. This exfoliate–align–release process—without the need of an intermediate carrier substrate—is enabled by combining a patterned, gold-mediated exfoliation technique with a new optically transparent, heat-releasable adhesive. WS₂/MoS₂ vdW heterostructure arrays produced by this method show the expected interlayer exciton between the monolayers. Light-emitting devices using WS₂ monolayers were also demonstrated, proving the functionality of the fabricated materials. Our work demonstrates a significant step towards developing mechanical exfoliation as a scalable dry transfer technique for the manufacturing of functional, atomically thin materials.