Data from: 17 GHz lossless InP-membrane active metasurface

Tanomura, Ryota 1 ; Takagi, Shinichi 1 ; Toprasertpong, Kasidit1 ; Tanemura, Takuo 1 ; Nakano, Yoshiaki 1 ; Soma, Go 1 ; Takenaka, Mitsuru 1 ; Kato, Eisaku1 ; Fukui, Taichiro 1 ; Sumita, Kei 1 ; Miyano, Hiroki 1 ; Yanwachirakul, Warakorn 1 ; Liu, Jiahao1 ; Yamada, Toshiki 2 ; Otomo, Akira 2

Published Oct 24, 2025 on Dryad. https://doi.org/10.5061/dryad.n8pk0p384

Data files

Oct 24, 2025 version files 32.36 MB

Dataset.zip

32.34 MB
README.md

21.06 KB

Abstract

High-speed active metasurfaces enable spatiotemporal light control within an ultra-thin device layer, offering new possibilities for optical communication, sensing, and computing. However, a tradeoff between electrical conductivity and optical loss has hindered the realization of a high-speed, low-loss device. Here, we experimentally demonstrate an active metasurface operating at 1.5-μm wavelength range that achieves a record-high 17.5 GHz modulation bandwidth while maintaining a high quality (Q) factor of 102 and ultra-low optical loss of 0.56 dB. This is enabled by the indium phosphide (InP) membrane platform, where n-InP offers high electron mobility and low free-carrier absorption simultaneously. A high-Q Friedrich-Wintgen quasi-bound-state-in-the-continuum mode within the InP-membrane high-contrast grating (InP HCG) traps light in the organic electro-optic material for efficient modulation. The InP HCG also functions as an ultralow-resistance interdigitated electrode, enabling 50-fold faster modulation than silicon-based counterparts. Our work paves the way towards active metasurfaces for high-speed spatiotemporal light control beyond the

The data set consists of csv data required to reproduce the figures in the manuscript and supplementary information.

The data set is structured as follows.

Folder Fig1:

Fig1d: Electric field intensity distribution of the resonating mode of InP HCG.
- fig1d_E2.csv : 2D data of electric field intensity distribution in Fig. 1D.
- fig1d_x.csv : x-axis of 2D map in Fig. 1D.
- fig1d_y.csv : y-axis of 2D map in Fig. 1D.
Fig1e: Doping concentration dependent electron mobility of n-InP and n-Si.
- fig1e_InP_line.csv : Data for InP in Fig. 1E.
  - Column 1: Doping concentration (cm^-3); Column 2: Mobility (cm²/Vs)
- fig1e_Si_line.csv : Data for Si in Fig. 1E.
  - Column 1: Doping concentration (cm^-3); Column 2: Mobility (cm²/Vs)
Fig1f: Doping concentration dependent absorption coefficient of n-InP and n-Si.
- fig1f_InP_line.csv : Data for InP (line plot, fit result) in Fig. 1f.
  - Column 1: Doping concentration (cm^-3); Column 2: Absorption coefficient (/cm)
- fig1f_Si_line.csv : Data for Si (line plot, fit result) in Fig. 1f.
  - Column 1: Doping concentration (cm^-3); Column 2: Absorption coefficient (/cm)
- fig1f_InP_scatter.csv : Data for InP (scatter plot, from literature) in Fig. 1f.
  - Column 1: Doping concentration (cm^-3); Column 2: Absorption coefficient (/cm)
- fig1f_Si_scatter.csv : Data for Si (scatter plot, from literature) in Fig. 1f.
  - Column 1: Doping concentration (cm^-3); Column 2: Absorption coefficient (/cm)
Fig1g: Absorption coefficient vs resistivity plot for n-InP and n-Si.
- fig1g_InP_line.csv : Data for InP (line plot, fit result) in Fig. 1g.
  - Column 1: Absorption coefficient (/cm); Column 2: Resistivity (ohm cm)
- fig1g_Si_line.csv : Data for Si (line plot, fit result) in Fig. 1g.
  - Column 1: Absorption coefficient (/cm); Column 2: Resistivity (ohm cm)
- fig1g_InP_scatter.csv : Data for InP (scatter plot, from literature) in Fig. 1g.
  - Column 1: Absorption coefficient (/cm); Column 2: Resistivity (ohm cm)
- fig1g_Si_scatter.csv : Data for Si (scatter plot, from literature) in Fig. 1g.
  - Column 1: Absorption coefficient (/cm); Column 2: Resistivity (ohm cm)

Folder Fig2:

Fig2a: Numerically simulated reflectance spectrum of InP HCG with different doping concentration.
- fig2a_1E17.csv : Data for ND=1e17cm^-3 in Fig. 2a.
  - Column 1: Wavelength (nm); Column 2: Reflectivity
- fig2a_2E17.csv : Data for ND=2e17cm^-3 in Fig. 2a.
  - Column 1: Wavelength (nm); Column 2: Reflectivity
- fig2a_5E17.csv : Data for ND=5e17cm^-3 in Fig. 2a.
  - Column 1: Wavelength (nm); Column 2: Reflectivity
- fig2a_1E18.csv : Data for ND=1e18cm^-3 in Fig. 2a.
  - Column 1: Wavelength (nm); Column 2: Reflectivity
- fig2a_2E18.csv : Data for ND=2e18cm^-3 in Fig. 2a.
  - Column 1: Wavelength (nm); Column 2: Reflectivity
- fig2a_5E18.csv : Data for ND=5e18cm^-3 in Fig. 2a.
  - Column 1: Wavelength (nm); Column 2: Reflectivity
- fig2a_1E19.csv : Data for ND=1e19cm^-3 in Fig. 2a.
  - Column 1: Wavelength (nm); Column 2: Reflectivity
- fig2a_2E19.csv : Data for ND=2e19cm^-3 in Fig. 2a.
  - Column 1: Wavelength (nm); Column 2: Reflectivity
Fig2b: Numerically simulated reflectance spectrum of Si HCG with different doping concentration.
- fig2b_1E17.csv : Data for ND=1e17cm^-3 in Fig. 2b.
  - Column 1: Wavelength (nm); Column 2: Reflectivity
- fig2b_2E17.csv : Data for ND=2e17cm^-3 in Fig. 2b.
  - Column 1: Wavelength (nm); Column 2: Reflectivity
- fig2b_5E17.csv : Data for ND=5e17cm^-3 in Fig. 2b.
  - Column 1: Wavelength (nm); Column 2: Reflectivity
- fig2b_1E18.csv : Data for ND=1e18cm^-3 in Fig. 2b.
  - Column 1: Wavelength (nm); Column 2: Reflectivity
- fig2b_2E18.csv : Data for ND=2e18cm^-3 in Fig. 2b.
  - Column 1: Wavelength (nm); Column 2: Reflectivity
- fig2b_5E18.csv : Data for ND=5e18cm^-3 in Fig. 2b.
  - Column 1: Wavelength (nm); Column 2: Reflectivity
- fig2b_1E19.csv : Data for ND=1e19cm^-3 in Fig. 2b.
  - Column 1: Wavelength (nm); Column 2: Reflectivity
- fig2b_2E19.csv : Data for ND=2e19cm^-3 in Fig. 2b.
  - Column 1: Wavelength (nm); Column 2: Reflectivity
Fig2c: Numerically simulated Q factor and optical loss of InP and Si HCGs under various doping concentrations.
- fig2c_InP_Loss.csv : Data for optical loss of InP in Fig. 2c.
  - Column 1: Doping concentration (cm^-3); Column 2: Optical loss (dB)
- fig2c_Si_Loss.csv : Data for optical loss of Si in Fig. 2c.
  - Column 1: Doping concentration (cm^-3); Column 2: Optical loss (dB)
- fig2c_InP_Q.csv : Data for Q factor of InP in Fig. 2c.
  - Column 1: Doping concentration (cm^-3); Column 2: Q factor
- fig2c_Si_Q.csv : Data for Q factor of Si in Fig. 2c.
  - Column 1: Doping concentration (cm^-3); Column 2: Q factor
Fig2d: Numerically simulated reflectance spectrum of InP HCG (doping oncentration: 1E19/cm³) while varying the refractive index nEO of OEO material.
- fig2d_nEO1648.csv : Data for nEO = 1.648 in Fig. 2d.
  - Column 1: Wavelength (nm); Column 2: Reflectivity
- fig2d_nEO1649.csv : Data for nEO = 1.649 in Fig. 2d.
  - Column 1: Wavelength (nm); Column 2: Reflectivity
- fig2d_nEO1650.csv : Data for nEO = 1.650 in Fig. 2d.
  - Column 1: Wavelength (nm); Column 2: Reflectivity
- fig2d_nEO1651.csv : Data for nEO = 1.651 in Fig. 2d.
  - Column 1: Wavelength (nm); Column 2: Reflectivity
- fig2d_nEO1652.csv : Data for nEO = 1.652 in Fig. 2d.
  - Column 1: Wavelength (nm); Column 2: Reflectivity
Fig2e: Numerically simulated reflectance spectrum of Si HCG (doping oncentration: 1E19/cm³) while varying the refractive index nEO of OEO material.
- fig2e_nEO1648.csv : Data for nEO = 1.648 in Fig. 2e.
  - Column 1: Wavelength (nm); Column 2: Reflectivity
- fig2e_nEO1649.csv : Data for nEO = 1.649 in Fig. 2e.
  - Column 1: Wavelength (nm); Column 2: Reflectivity
- fig2e_nEO1650.csv : Data for nEO = 1.650 in Fig. 2e.
  - Column 1: Wavelength (nm); Column 2: Reflectivity
- fig2e_nEO1651.csv : Data for nEO = 1.651 in Fig. 2e.
  - Column 1: Wavelength (nm); Column 2: Reflectivity
- fig2e_nEO1652.csv : Data for nEO = 1.652 in Fig. 2e.
  - Column 1: Wavelength (nm); Column 2: Reflectivity
Fig2f: Numerically simulated reflectance of InP and Si HCGs (doping oncentration: 1E19/cm³) at a fixed wavelength while varying the refractive index nEO of OEO material.
- fig2f_InP.csv : Data for InP in Fig. 2f.
  - Column 1: Refractive index nEO; Column 2: Reflectance (dB)
- fig2f_Si.csv : Data for Si in Fig. 2f.
  - Column 1: Refractive index nEO; Column 2: Reflectance (dB)
Fig2g: Numerically simulated doping concentration dependent 3dB bandwidth of InP and Si HCGs for various device sizes.
- fig2g_InP_40um.csv : Data for InP with 40um*40um size device in Fig. 2g.
  - Column 1: Doping concentration (cm^-3); Column 2: 3-dB bandwidth (Hz)
- fig2g_InP_60um.csv : Data for InP with 60um*60um size device in Fig. 2g.
  - Column 1: Doping concentration (cm^-3); Column 2: 3-dB bandwidth (Hz)
- fig2g_InP_80um.csv : Data for InP with 80um*80um size device in Fig. 2g.
  - Column 1: Doping concentration (cm^-3); Column 2: 3-dB bandwidth (Hz)
- fig2g_Si_40um.csv : Data for Si with 40um*40um size device in Fig. 2g.
  - Column 1: Doping concentration (cm^-3); Column 2: 3-dB bandwidth (Hz)
- fig2g_Si_60um.csv : Data for Si with 60um*60um size device in Fig. 2g.
  - Column 1: Doping concentration (cm^-3); Column 2: 3-dB bandwidth (Hz)
- fig2g_Si_80um.csv : Data for Si with 80um*80um size device in Fig. 2g.
  - Column 1: Doping concentration (cm^-3); Column 2: 3-dB bandwidth (Hz)
- fig2g_exp.csv : Data for experiment result in Fig. 2g.
  - Column 1: Doping concentration (cm^-3); Column 2: 3-dB bandwidth (Hz)

Folder Fig3:

Fig3f: Experimentally obtained doping concentration and resistivity of n-InP compared with the Caughey-Thomas-like model.
- fig3f_line.csv : Data for line plot in Fig. 3f.
  - Column 1: Doping concentration (cm^-3); Column 2: Resistivity (ohm*cm)
- fig3f_scatter.csv : Data for scattered point in Fig. 3f.
  - Column 1: Doping concentration (cm^-3); Column 2: Resistivity (ohm*cm)
Fig3g: Experimentally obtained device capacitance for two device sizes compared with the numerical simulation result.
- fig3g_scatter.csv : Data for scattered points in Fig. 3g.
  - Column 1: Device size (um); Column 2: Capacitance (fF)
- fig3g_sim.csv : Data for simulation result in Fig. 3g.
  - Column 1: Device size (um); Column 2: Capacitance (fF)
- fig3g_L2.csv : Data for L^2 reference line in Fig. 3g.
  - Column 1: Device size (um); Column 2: Capacitance (fF)

Folder Fig4:

Fig4a: Experimentally obtained reflectance and transmission spectra of InP HCG under various bias voltages.
- fig4a_Ref_+30V.csv : Data for reflectance for +30V in Fig. 4a.
  - Column 1: Wavelength (nm); Column 2: Reflectance
- fig4a_Ref_0V.csv : Data for reflectance for 0V in Fig. 4a.
  - Column 1: Wavelength (nm); Column 2: Reflectance
- fig4a_Ref_-30V.csv : Data for reflectance for -30V in Fig. 4a.
  - Column 1: Wavelength (nm); Column 2: Reflectance
- fig4a_Ref+Tran_+30V.csv : Data for sum of reflectance and transmittance for +30V in Fig. 4a.
  - Column 1: Wavelength (nm); Column 2: Reflectance + Transmittance
- fig4a_Ref+Tran_0V.csv : Data for sum of reflectance and transmittance for 0V in Fig. 4a.
  - Column 1: Wavelength (nm); Column 2: Reflectance + Transmittance
- fig4a_Ref+Tran_-30V.csv : Data for sum of reflectance and transmittance for -30V in Fig. 4a.
  - Column 1: Wavelength (nm); Column 2: Reflectance + Transmittance
- fig4a_Tran_+30V.csv : Data for transmittance for +30V in Fig. 4a.
  - Column 1: Wavelength (nm); Column 2: Reflectance + Transmittance
- fig4a_Tran_0V.csv : Data for transmittance for 0V in Fig. 4a.
  - Column 1: Wavelength (nm); Column 2: Reflectance + Transmittance
- fig4a_Tran_-30V.csv : Data for transmittance for -30V in Fig. 4a.
  - Column 1: Wavelength (nm); Column 2: Reflectance + Transmittance
- fig4c_Ref_data.csv : Experimental data for reflected optical power in Fig. 4c.
  - Column 1: Time (sec); Column 2: Reflected optical power (a.u.)
Fig4c: Reflected and transmitted optical power when sinusoidal voltage is applied to the device.
- fig4c_Tran_data.csv : Experimental data for transmitted optical power in Fig. 4c.
  - Column 1: Time (sec); Column 2: Transmitted optical power (a.u.)
- fig4c_Ref_fit.csv : Fitting result for reflected optical power in Fig. 4c.
  - Column 1: Time (sec); Column 2: Reflected optical power (a.u.)
- fig4c_Tran_fit.csv : Fitting result for transmitted optical power in Fig. 4c.
  - Column 1: Time (sec); Column 2: Transmitted optical power (a.u.)

Folder Fig5:

Fig5a: Frequency response of the device.
- fig5a_raw.csv: Raw data for Fig. 5a.
  - Column 1: Frequency (Hz); Column 2: Electro-optic S21 (dB)
- fig5a_ave.csv: Moving average result for Fig. 5a.
  - Column 1: Frequency (Hz); Column 2: Electro-optic S21 (dB)
- fig5a_fit.csv: Fitted result for Fig. 5a.
  - Column 1: Frequency (Hz); Column 2: Electro-optic S21 (dB)

Folder FigS1:

FigS1: Reflectance contour map of InP HCG as function of wavelength and grating thickness.
- figS1_Reflectance.csv: Reflectance value (2d map) for Fig. S1.
- figS1_thickness.csv: Normalized thickness (2d map) for Fig. S1.
- figS1_wavelength.csv: Normalized wavelength (2d map) for Fig. S1.
- figS1_inset_Reflectance.csv: Reflectance value (2d map) for inset of Fig. S1.
- figS1_inset_thickness.csv: Normalized thickness (2d map) for inset of Fig. S1.
- figS1_inset_wavelength.csv: Normalized wavelength (2d map) for inset of Fig. S1.

Folder FigS2:

FigS2a: Electric field intensity profile of resonating mode of InP HCG.
- figS2a_E2.csv : 2D data of electric field intensity distribution in Fig. S2A.
- figS2a_x.csv : x-axis of 2D map in Fig. S2A.
- figS2a_y.csv : y-axis of 2D map in Fig. S2A.
FigS2b: Electric field intensity profile of resonating mode of Si HCG.
- figS2b_E2.csv : 2D data of electric field intensity distribution in Fig. S2B.
- figS2b_x.csv : x-axis of 2D map in Fig. S2B.
- figS2b_y.csv : y-axis of 2D map in Fig. S2B.

Folder FigS3:

FigS3b: Measured electrical resistance of TLM test patterns with various gap length.
- FigS3b_scatter.csv : Data for scatter plot of Fig. S3.
  - Column 1: Gap (um); Column 2: Resistance (ohm)
- FigS3b_line.csv : Data for line plot of Fig. S3.
  - Column 1: Gap (um); Column 2: Resistance (ohm)

Folder FigS4:

FigS4b: Measured Hall voltage while varying applied magnetic flux.
- FigS4b_scatter.csv : Data for scatter plot of Fig. S4.
  - Column 1: Magnetic flux (T); Column 2: Hall voltage (mV)
- FigS4b_line.csv : Data for line plot of Fig. S4.
  - Column 1: Magnetic flux (T); Column 2: Hall voltage (mV)

Folder FigS5:

FigS5a: Measured electrical capacitance of the InP HCG devices with two different sizes.
- FigS5a_40um.csv : Data for 40um*40um size device in Fig. S5a.
  - Column 1: Bias voltage (V); Column 2: Capacitance (F)
- FigS5a_80um.csv : Data for 80um*80um size device in Fig. S5a.
  - Column 1: Bias voltage (V); Column 2: Capacitance (F)
FigS5b: Numerically simulated frequency dependence of the impedance of the device compared with the experimentally obtained device capacitance.
- FigS5b_40um.csv : Data for line plot of 40um*40um size device in Fig. S5b.
  - Column 1: Frequency (Hz); Column 2: Impedance (ohm)
- FigS5b_80um.csv : Data for line plot of 80um*80um size device in Fig. S5b.
  - Column 1: Frequency (Hz); Column 2: Impedance (ohm)
- FigS5b_227fF.csv : Data for line plot of 227fF in Fig. S5b.
  - Column 1: Frequency (Hz); Column 2: Impedance (ohm)
- FigS5b_951fF.csv : Data for line plot of 951fF in Fig. S5b.
  - Column 1: Frequency (Hz); Column 2: Impedance (ohm)

Folder FigS6:

FigS6a: Q factor of InP HCG as a function of grating thickness and bar width.
- FigS6a_Q.csv : Data of Q factor (2D map) for Fig. S6.
- FigS6a_thickness.csv : Data of thickness (nm; 2D map) for Fig. S6.
- FigS6a_width.csv : Data of width (nm; 2D map) for Fig. S6.
FigS6b: Q factor of InP HCG as a function of grating thickness for a fixed bar width.
- FigS6b.csv : Data for Fig. S6.
  - Column 1: Thickness (nm); Column 2: Q factor

Folder FigS7:

FigS7b: Q factor of InP HCG as a function of etching angle.
- FigS7b.csv : Data for Fig. S7b.
  - Column 1: Etching angle (deg); Column 2: Q factor

Folder FigS8:

FigS8: 3dB bandwidth of InP HCG as a function of device size.
- FigS8_red-solid.csv : Data for red solid line of Fig. S8.
  - Column 1: Device size (um); Column 2: 3-dB Bandwidth (GHz)
- FigS8_black-dotted.csv : Data for black-dotted line of Fig. S8.
  - Column 1: Device size (um); Column 2: 3-dB Bandwidth (GHz)

Folder FigS9:

FigS9a: Wavelength dependence of the reflectance and the phase of the complex reflectance of InP HCG.
- FigS9a_ref.csv : Data for reflectance of Fig. S9a.
  - Column 1: Wavelength (nm); Column 2: Reflectance
- FigS9a_angle.csv : Data for angle of Fig. S9a.
  - Column 1: Wavelength (nm); Column 2: Angle/2pi
FigS9b: The trajectory of complex reflectance of InP HCG while sweeping the wavelength.
- FigS9b.csv : Data for Fig. S9b.
  - Column 1: Re(r); Column 2: Im(r); Column 3: Wavelength (nm)

Folder FigS10:

FigS10a: Wavelength dependence of the phase of the complex reflectance of InP HCG for various refractive index nEO of OEO material.
- FigS10a_nEO_1p64.csv : Data for nEO=1.64 of Fig. S10a.
  - Column 1: Wavelength (nm); Column 2: Angle/2pi
- FigS10a_nEO_1p642.csv : Data for nEO=1.642 of Fig. S10a.
  - Column 1: Wavelength (nm); Column 2: Angle/2pi
- FigS10a_nEO_1p644.csv : Data for nEO=1.644 of Fig. S10a.
  - Column 1: Wavelength (nm); Column 2: Angle/2pi
- FigS10a_nEO_1p646.csv : Data for nEO=1.646 of Fig. S10a.
  - Column 1: Wavelength (nm); Column 2: Angle/2pi
- FigS10a_nEO_1p648.csv : Data for nEO=1.648 of Fig. S10a.
  - Column 1: Wavelength (nm); Column 2: Angle/2pi
- FigS10a_nEO_1p65.csv : Data for nEO=1.65 of Fig. S10a.
  - Column 1: Wavelength (nm); Column 2: Angle/2pi
- FigS10a_nEO_1p652.csv : Data for nEO=1.652 of Fig. S10a.
  - Column 1: Wavelength (nm); Column 2: Angle/2pi
- FigS10a_nEO_1p654.csv : Data for nEO=1.654 of Fig. S10a.
  - Column 1: Wavelength (nm); Column 2: Angle/2pi
- FigS10a_nEO_1p656.csv : Data for nEO=1.656 of Fig. S10a.
  - Column 1: Wavelength (nm); Column 2: Angle/2pi
- FigS10a_nEO_1p658.csv : Data for nEO=1.658 of Fig. S10a.
  - Column 1: Wavelength (nm); Column 2: Angle/2pi
- FigS10a_nEO_1p66.csv : Data for nEO=1.66 of Fig. S10a.
  - Column 1: Wavelength (nm); Column 2: Angle/2pi
FigS10b: The trajectory of complex reflectance of InP HCG while sweeping the refractive index nEO of OEO material.
- FigS10b.csv : Data for Fig. S10b.
  - Column 1: Re(r); Column 2: Im(r); Column 3: Refractive index nEO

Folder SigS11

FigS11b: Electric field intensity profile of the resonating mode of InP HCG with feedback mirror.
- figS11b_E2.csv : 2D data of electric field intensity distribution in Fig. S11B.
- figS11b_x.csv : x-axis of 2D map in Fig. S11B.
- figS11b_y.csv : y-axis of 2D map in Fig. S11B.

Folder SigS12

FigS12a: Wavelength dependence of the reflectance and the phase of the complex reflectance of InP HCG with feedback mirror.
- FigS12a_ref.csv : Data for reflectance of Fig. S12a.
  - Column 1: Wavelength (nm); Column 2: Reflectance
- FigS12a_angle.csv : Data for angle of Fig. S12a.
  - Column 1: Wavelength (nm); Column 2: Angle/2pi
FigS12b: The trajectory of complex reflectance of InP HCG with feedback mirror while sweeping the wavelength.
- FigS12b.csv : Data for Fig. S12b.
  - Column 1: Re(r); Column 2: Im(r); Column 3: Wavelength (nm)

Folder Fig S13

FigS13a: Wavelength dependence of the phase of the complex reflectance of InP HCG with feedback mirror for various refractive index nEO of OEO material.
- FigS13a_nEO_1p64.csv : Data for nEO=1.64 of Fig. S13a.
  - Column 1: Wavelength (nm); Column 2: Angle/2pi
- FigS13a_nEO_1p642.csv : Data for nEO=1.642 of Fig. S13a.
  - Column 1: Wavelength (nm); Column 2: Angle/2pi
- FigS13a_nEO_1p644.csv : Data for nEO=1.644 of Fig. S13a.
  - Column 1: Wavelength (nm); Column 2: Angle/2pi
- FigS13a_nEO_1p646.csv : Data for nEO=1.646 of Fig. S13a.
  - Column 1: Wavelength (nm); Column 2: Angle/2pi
- FigS13a_nEO_1p648.csv : Data for nEO=1.648 of Fig. S13a.
  - Column 1: Wavelength (nm); Column 2: Angle/2pi
- FigS13a_nEO_1p65.csv : Data for nEO=1.65 of Fig. S13a.
  - Column 1: Wavelength (nm); Column 2: Angle/2pi
- FigS13a_nEO_1p652.csv : Data for nEO=1.652 of Fig. S13a.
  - Column 1: Wavelength (nm); Column 2: Angle/2pi
- FigS13a_nEO_1p654.csv : Data for nEO=1.654 of Fig. S13a.
  - Column 1: Wavelength (nm); Column 2: Angle/2pi
- FigS13a_nEO_1p656.csv : Data for nEO=1.656 of Fig. S13a.
  - Column 1: Wavelength (nm); Column 2: Angle/2pi
- FigS13a_nEO_1p658.csv : Data for nEO=1.658 of Fig. S13a.
  - Column 1: Wavelength (nm); Column 2: Angle/2pi
- FigS13a_nEO_1p66.csv : Data for nEO=1.66 of Fig. S13a.
  - Column 1: Wavelength (nm); Column 2: Angle/2pi
FigS13b: The trajectory of complex reflectance of InP HCG with feedback mirror while sweeping the refractive index nEO of OEO material.
- FigS13b.csv : Data for Fig. S13b.
  - Column 1: Re(r); Column 2: Im(r); Column 3: Refractive index nEO

Folder Fig S14:

FigS14: Doping concentration dependence of the electron mobility of n-InP calculated by Caughey-Thomas-like model compared with experimentally obtained value.
- FigS14_exp.csv : Experiment data point for Fig. S14.
  - Column 1: Doping concentration (cm^-3); Column 2: Mobility (cm²/Vs)
- FigS14_line.csv : Data for line plot of Fig. S14.
  - Column 1: Doping concentration (cm^-3); Column 2: Mobility (cm²/Vs)

Folder Fig S16:

FigS16a: Experimentally obtained reflectance spectrum of InP HCG fitted to the Fano resonance spectrum.
- FigS16a_data.csv : Experiment data for Fig. S16a.
  - Column 1: Wavelength (nm); Column 2: Reflectance
- FigS16a_fit.csv : Fitting result for Fig. S16a.
  - Column 1: Wavelength (nm); Column 2: Reflectance
FigS16b: Experimentally obtained Q factor of InP HCG under various bias voltages.
- FigS16b.csv : Data for Fig. S16b.
  - Column 1: Bias voltage (V); Column 2: Q factor
FigS16c: Experimentally obtained resonance wavelength of InP HCG under various bias voltages.
- FigS16c_scatter.csv : Data for scatter plot in Fig. S16c.
  - Column 1: Bias voltage (V); Column 2: Resonance wavelength (nm)
- FigS16c_line.csv : Data for line plot in Fig. S16c.
  - Column 1: Bias voltage (V); Column 2: Resonance wavelength (nm)

Data from: 17 GHz lossless InP-membrane active metasurface

Data files

Abstract

README: Data underlying the article: "17 GHz Lossless InP-Membrane Active Metasurface".